Focused-ion-beam fabrication of ZnO nanorod-based UV photodetector using the in-situ lift-out technique

نویسندگان

  • Oleg Lupan
  • Guangyu Chai
  • Leonid Chernyak
  • Olena Lopatiuk-Tirpak
چکیده

1 Department of Physics, University of Central Florida, P.O. Box 162385, Orlando, USA 2 Department of Microelectronics and Semiconductor Devices, Technical University of Moldova, Stefan cel Mare Blvd. 168, 2004, Chisinau, Moldova 3 Apollo Technologies, Inc., 205 Waymont Court, S111, FL 32746, Lake Mary, USA 4 Advanced Materials Processing and Analysis Center, and Department of Mechanical, Materials, and Aerospace Engineering, University of Central Florida, P.O. Box 162385, Orlando, USA

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تاریخ انتشار 2008